- 专利标题: SEMICONDUCTOR DEVICE HAVING HYBRID MIDDLE OF LINE CONTACTS
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申请号: US17504765申请日: 2021-10-19
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公开(公告)号: US20230124681A1公开(公告)日: 2023-04-20
- 发明人: Ruilong Xie , Su Chen Fan , Veeraraghavan S. Basker , Julien Frougier , Nicolas Loubet
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L29/423 ; H01L29/06 ; H01L29/786 ; H01L21/8238 ; H01L29/417
摘要:
A CMOS (complementary metal-oxide semiconductor) device includes an n-channel metal-oxide semiconductor (NMOS) device, a p-channel metal-oxide semiconductor (PMOS) device, the NMOS and the PMOS device surrounded by a first dielectric material, the NMOS device separated from the PMOS device by a second dielectric material, a first NMOS gate separated from a first PMOS gate by the second dielectric material, a second NMOS gate electrically connected to a second PMOS gate by a metal link disposed between the NMOS gate and the PMOS gate, the metal link disposed above the second dielectric material, a first source/drain (S/D) contact disposed above the second dielectric material, the first S/D contact disposed in contact with both NMOS S/D region and a PMOS S/D region, and a second S/D contact disposed adjacent to the second dielectric material, the second S/D contact disposed in contact with a single S/D region.
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