Invention Application
- Patent Title: INTERCONNECT STRUCTURE AND METHODS OF FORMING THE SAME
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Application No.: US17460537Application Date: 2021-08-30
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Publication No.: US20230062128A1Publication Date: 2023-03-02
- Inventor: Shu-Wei LI , Yu-Chen CHAN , Shin-Yi YANG , Ming-Han LEE , Shau-Lin SHUE
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/532

Abstract:
An interconnect structure and methods of forming the same are described. In some embodiments, the structure includes a first dielectric layer and one or more first conductive features disposed in the first dielectric layer. The one or more first conductive features includes a first metal. The structure further includes a plurality of graphene layers disposed on each of the one or more first conductive features, the plurality of graphene layers include a second metal intercalated therebetween, and the second metal is different from the first metal.
Public/Granted literature
- US12211740B2 Interconnect structure and methods of forming the same Public/Granted day:2025-01-28
Information query
IPC分类: