Invention Application
- Patent Title: MAINTENANCE METHODS FOR POLISHING SYSTEMS AND ARTICLES RELATED THERETO
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Application No.: US17977794Application Date: 2022-10-31
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Publication No.: US20230060141A1Publication Date: 2023-03-02
- Inventor: Shantanu Rajiv GADGIL , Sumit Subhash PATANKAR , Nathan Arron DAVIS , Michael J. COUGHLIN , Allen L. D'AMBRA
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B37/34 ; C09D5/00 ; B65D81/32 ; B05C17/00

Abstract:
Chemically impregnated applicators used to provide hydrophobic surfaces on chemical mechanical polishing system components and related application methods are shown. A method of forming a hydrophobic coating on a surface of a polishing system component includes cleaning the surface of the polishing system component to remove a polishing fluid residue therefrom and applying a hydrophobicity causing chemical solution to the surface of the polishing system component.
Public/Granted literature
- US11986925B2 Maintenance methods for polishing systems and articles related thereto Public/Granted day:2024-05-21
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