Invention Publication
- Patent Title: LITHOGRAPHIC APPARATUS
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Application No.: US18123620Application Date: 2023-03-20
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Publication No.: US20230266678A1Publication Date: 2023-08-24
- Inventor: Hans BUTLER , Engelbertus Antonius Fransiscus VAN DER PASCH , Paul Corné Henri DE WIT
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL VELDHOVEN
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL VELDHOVEN
- Priority: EP 171338.3 2016.05.25
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F9/00

Abstract:
A lithographic apparatus having a substrate table, a projection system, an encoder system, a measurement frame and a measurement system. The substrate table has a holding surface for holding a substrate. The projection system is for projecting an image on the substrate. The encoder system is for providing a signal representative of a position of the substrate table. The measurement system is for measuring a property of the lithographic apparatus. The holding surface is along a plane. The projection system is at a first side of the plane. The measurement frame is arranged to support at least part of the encoder system and at least part of the measurement system at a second side of the plane different from the first side.
Public/Granted literature
- US11914308B2 Lithographic apparatus Public/Granted day:2024-02-27
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