- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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申请号: US18079170申请日: 2022-12-12
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公开(公告)号: US20230223365A1公开(公告)日: 2023-07-13
- 发明人: Jong Sik Paek , Won Chul Do , Doo Hyun Park , Eun Ho Park , Sung Jae Oh
- 申请人: Amkor Technology Singapore Holding Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: Amkor Technology Singapore Holding Pte. Ltd.
- 当前专利权人: Amkor Technology Singapore Holding Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 优先权: KR 20120131967 2012.11.20
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/367 ; H01L21/56 ; H01L21/768 ; H01L23/498 ; H01L21/683 ; H01L23/31 ; H01L21/48 ; H01L21/60
摘要:
A semiconductor device including a relatively thin interposer excluding a through silicon hole and a manufacturing method thereof are provided. The method includes forming an interposer on a dummy substrate. The forming of the interposer includes, forming a dielectric layer on the dummy substrate, forming a pattern and a via on the dielectric layer, and forming a seed layer at the pattern and the via of the dielectric layer and forming a redistribution layer and a conductive via on the seed layer. A semiconductor die is connected with the conductive via facing an upper portion of the interposer, and the semiconductor die is encapsulated with an encapsulant. The dummy substrate is removed from the interposer. A bump is connected with the conductive via facing a lower portion of the interposer.
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