Invention Publication
- Patent Title: WAVEGUIDES AND MANUFACTURING METHODS THEREOF
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Application No.: US18072196Application Date: 2022-11-30
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Publication No.: US20230194954A1Publication Date: 2023-06-22
- Inventor: Gerrit Jacobus Hendrik BRUSSAARD , Johannes Richard Karl KOHLER
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 217158.1 2021.12.22
- Main IPC: G02F1/365
- IPC: G02F1/365 ; G02F1/35

Abstract:
A waveguide including: a first section, the first section configured to generate, by a non-linear optical process, a broadened wavelength spectrum of pulsed radiation provided to an input end of the waveguide; a second section, the second section including an output end of the waveguide, the second section configured to exhibit a larger absolute value of group velocity dispersion than the first section; wherein a length of the second section is configured to reduce a peak intensity of one or more peaks in the broadened wavelength spectrum by at least 20%.
Public/Granted literature
- US12050392B2 Waveguides and manufacturing methods thereof Public/Granted day:2024-07-30
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