发明公开
- 专利标题: SEMICONDUCTOR DEVICE
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申请号: US17831513申请日: 2022-06-03
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公开(公告)号: US20230145260A1公开(公告)日: 2023-05-11
- 发明人: Yang Xu , Nam Kyu Cho , Seok Hoon Kim , Yong Seung Kim , Pan Kwi Park , Dong Suk Shin , Sang Gil Lee , Si Hyung Lee
- 申请人: SAMSUNG ELECTRONICS CO.,LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO.,LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO.,LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR 20210151001 2021.11.05
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/417 ; H01L29/06
摘要:
A semiconductor device including: a plurality of fin-shaped patterns spaced apart from each other in a first direction and extending in a second direction on a substrate; a field insulating layer covering sidewalls of the plurality of fin-shaped patterns and disposed between the fin-shaped patterns; a source/drain pattern connected to the plurality of fin-shaped patterns on the field insulating layer, the source/drain pattern including bottom surfaces respectively connected to the fin-shaped patterns, and at least one connection surface connecting the bottom surfaces to each other; and a sealing insulating pattern extending along the connection surface of the source/drain pattern and an upper surface of the field insulating layer, wherein the source/drain pattern includes a silicon-germanium pattern doped with a p-type impurity.
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