Invention Application
- Patent Title: METHOD OF STORING WORKPIECE USING WORKPIECE STORAGE SYSTEM
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Application No.: US17871984Application Date: 2022-07-25
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Publication No.: US20220359252A1Publication Date: 2022-11-10
- Inventor: Tzu-Chi CHIU , Jen-Ti WANG , Ting-Wei WANG , Kuo-Fong CHUANG
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673 ; H01L21/67 ; G05B15/02

Abstract:
A method includes disposing, by using a transport module of a workpiece storage system, a first workpiece on a first workpiece carrier; disposing, by using the transport module, the first workpiece carrier with the first workpiece in a workpiece container; disposing, by using the transport module, a second workpiece in the workpiece container, wherein the first workpiece and the second workpiece have different sizes; and transferring, by using the transport module, the workpiece container containing the second workpiece and the first workpiece carrier with the first workpiece to a stocker to store the workpiece container.
Public/Granted literature
- US11848221B2 Method of storing workpiece using workpiece storage system Public/Granted day:2023-12-19
Information query
IPC分类: