- 专利标题: APPARATUS FOR AND METHOD OF GENERATING MULTIPLE LASER BEAMS
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申请号: US17612035申请日: 2020-05-15
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公开(公告)号: US20220255288A1公开(公告)日: 2022-08-11
- 发明人: Walter Dale Gillespie , Joshua Jon Thornes , Thomas Patrick Duffey , Eric Anders Mason , Rabin Paudel
- 申请人: Cymer, LLC
- 申请人地址: US CA San Diego
- 专利权人: Cymer, LLC
- 当前专利权人: Cymer, LLC
- 当前专利权人地址: US CA San Diego
- 国际申请: PCT/US2020/033262 WO 20200515
- 主分类号: H01S3/225
- IPC分类号: H01S3/225 ; H01S3/10 ; H01S3/134 ; G03F7/20
摘要:
Apparatus for and method of generating multiple laser beams using multiple laser chambers. The relative timing of the beams is controllable so they may, for example, be interleaved, may overlap, or be prevented from overlapping, or may occur in rapid sequence. The beams may have different spectral and power characteristics such as different wavelengths. Also disclosed is a system in which at least one of the multiple laser chambers is configured to generate radiation of two different wavelengths.
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