- 专利标题: ELECTRODE WELDING METHOD AND ELECTRODE WELDING APPARATUS
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申请号: US17648329申请日: 2022-01-19
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公开(公告)号: US20220226934A1公开(公告)日: 2022-07-21
- 发明人: Yuki IKKU , Youngsuk KIM
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP2021-007890 20210121
- 主分类号: B23K26/50
- IPC分类号: B23K26/50 ; H01L23/00
摘要:
An electrode welding method includes a laser irradiation apparatus preparation step of preparing a laser irradiation apparatus including a laser oscillator that emits a laser beam with a wavelength having absorbability with respect to a semiconductor chip and a spatial light modulator that adjusts the energy distribution of the laser beam emitted by the laser oscillator, an electrode positioning step of positioning, corresponding to electrodes of a wiring substrate, bump electrodes of a device, and an electrode welding step of irradiating the back surface of the semiconductor chip with the laser beam and welding the bump electrodes to the electrodes of the wiring substrate.
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