发明申请
- 专利标题： FIXTURE AND METHOD FOR DETERMINING POSITION OF A TARGET IN A REACTION CHAMBER
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申请号： US17549311申请日： 2021-12-13
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公开(公告)号： US20220189804A1公开(公告)日： 2022-06-16
- 发明人: Siyao Luan , Peipei Gao , Xing Lin , Alexandros Demos , Kishor Patil
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; C23C16/458 ; C23C16/455
摘要：
A fixture includes a frame, a leveling plate, a bracket, and a laser profiler. The frame is arranged for fixation above a reaction chamber arranged to deposit a film onto a substrate. The leveling plate is supported on the frame. The bracket is supported on the leveling plate. The laser profiler is suspended from the bracket, overlays the reaction chamber, and has a field of view that extends through the leveling plate and the frame to determine position of a target within the reaction chamber. Semiconductor processing systems and methods of determining position of targets within reaction chambers in semiconductor processing systems are also described.
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