- 专利标题: MACROSCOPIC TEXTURING FOR ANODIZED AND COATED SURFACES
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申请号: US17432434申请日: 2020-02-05
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公开(公告)号: US20220139677A1公开(公告)日: 2022-05-05
- 发明人: Gordon Wen-Yin Peng , Adrian Radocea , Yu Jiang , Mansa Rajagopalan , Nicolas Londono
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 国际申请: PCT/US2020/016883 WO 20200205
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01L21/683 ; C23C4/11 ; C23C4/02 ; C25D11/16
摘要:
A consumable part for a plasma processing chamber includes a plasma facing side. An engineered surface is formed into the plasma facing side of the consumable part. A plurality of raised features defines the engineered surface, wherein features are arranged in a predefined pattern, wherein each of the plurality of raised features includes a top region having an outer edge and a sidewall. A base surface of the engineered surface is configured to surround each of the plurality of raised features, such that a corresponding sidewall of a corresponding raised feature extends up at an angle from the base surface to a corresponding top region. The consumable part is configured to be installed in the plasma processing chamber. The consumable part is configured to be exposed to a plasma and byproducts of the plasma.
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