Invention Application
- Patent Title: MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED TEMPERATURE CONTROL
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Application No.: US16586548Application Date: 2019-09-27
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Publication No.: US20210100076A1Publication Date: 2021-04-01
- Inventor: James Carducci , Richard C. Fovell , Larry D. Elizaga , Silverst Rodrigues , Thai Cheng Chua , Philip Allan Kraus
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H05B6/64
- IPC: H05B6/64 ; H05B6/80

Abstract:
Embodiments disclosed herein include a housing for a source assembly. In an embodiment, the housing comprises a conductive body with a first surface and a second surface opposite from the first surface, and a plurality of openings through a thickness of the conductive body between the first surface and the second surface. In an embodiment, the housing further comprises a channel into the first surface of the conductive body, and a cover over the channel. In an embodiment, a first stem over the cover extends away from the first surface, and a second stem over the cover extends away from the first surface. In an embodiment, the first stem and the second stem open into the channel.
Public/Granted literature
- US11564292B2 Monolithic modular microwave source with integrated temperature control Public/Granted day:2023-01-24
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