Invention Application
- Patent Title: A METHOD OF FORMING AN APPARATUS COMPRISING PEROVSKITE
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Application No.: US16308884Application Date: 2017-06-14
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Publication No.: US20200313091A1Publication Date: 2020-10-01
- Inventor: Alexander BESSONOV
- Applicant: EMBERION OY
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@40a9e148
- International Application: PCT/FI2017/050440 WO 20170614
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01G9/00 ; H01G9/20 ; H01L51/42 ; H01L51/50 ; H01L51/52 ; G03F1/42 ; G03F7/20 ; G03F7/16

Abstract:
A method comprising: providing a substrate comprising one or more electronic structures; providing a layer of perovskite overlaying the one or more electronic structures; coating a layer of photoresist material overlaying the layer of perovskite; aligning a mask with the one or more electronic structures and patterning the photoresist material; and using the same etchant to remove sections of the patterned photoresist material and the perovskite underneath the sections of the photoresist material.
Public/Granted literature
- US10985319B2 Method of forming an apparatus comprising perovskite Public/Granted day:2021-04-20
Information query
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