发明申请
- 专利标题: Synchronized Parallel Tile Computation for Large Area Lithography Simulation
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申请号: US16889514申请日: 2020-06-01
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公开(公告)号: US20200293023A1公开(公告)日: 2020-09-17
- 发明人: Danping Peng , Junjiang Lei , Daniel Beylkin , Kenneth Lik Kin Ho , Sagar Trivedi , Fangbo Xu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 主分类号: G05B19/4097
- IPC分类号: G05B19/4097 ; G03F1/70 ; G03F1/36 ; G03F1/24 ; G06F30/392
摘要:
Examples of synchronized parallel tile computation techniques for large area lithography simulation are disclosed herein for solving tile boundary issues. An exemplary method for integrated circuit (IC) fabrication comprises receiving an IC design layout, partitioning the IC design layout into a plurality of tiles, performing a simulated imaging process on the plurality of tiles, generating a modified IC design layout by combining final synchronized image values from the plurality of tiles, and providing the modified IC design layout for fabricating a mask. Performing the simulated imaging process comprises executing a plurality of imaging steps on each of the plurality of tiles. Executing each of the plurality of imaging steps comprises synchronizing image values from the plurality of tiles via data exchange between neighboring tiles.
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