Invention Application
- Patent Title: THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE
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Application No.: US16750176Application Date: 2020-01-23
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Publication No.: US20200161330A1Publication Date: 2020-05-21
- Inventor: KOHJI KANAMORI , SEO-GOO KANG , YOUNGHWAN SON , KWONSOON JO
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@23456601
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C8/14 ; H01L27/11575 ; H01L27/11565 ; H01L27/11573 ; H01L27/1157

Abstract:
A three-dimensional semiconductor memory device includes a peripheral logic structure on a semiconductor substrate. A horizontal semiconductor layer is on the peripheral logic structure and includes a cell array region and a connection region. Electrode structures extend in a first direction on the horizontal semiconductor layer and are spaced apart in a second direction intersecting the first direction. A pair of the electrode structures adjacent to each other are symmetrically disposed to define a contact region partially exposing the horizontal semiconductor layer. A through via structure is on the contact region and connects the electrode structures to the peripheral logic structure. Each of the electrode structures includes a plurality of gate insulation regions extending along the first direction on the connection region. The gate insulation regions have different lengths from each other in the first direction.
Public/Granted literature
- US11211402B2 Three-dimensional semiconductor memory device Public/Granted day:2021-12-28
Information query
IPC分类: