Invention Application
- Patent Title: PHASED ARRAY MODULAR HIGH-FREQUENCY SOURCE
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Application No.: US16669257Application Date: 2019-10-30
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Publication No.: US20200066490A1Publication Date: 2020-02-27
- Inventor: Philip Allan Kraus , Thai Cheng Chua , Christian Amormino , Dmitry A. Dzilno
- Applicant: Applied Materials, Inc.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01Q3/34 ; H01Q21/00 ; H03B5/24

Abstract:
Embodiments described herein include a modular high-frequency emission source comprising a plurality of high-frequency emission modules and a phase controller. In an embodiment, each high-frequency emission module comprises an oscillator module, an amplification module, and an applicator. In an embodiment, each oscillator module comprises a voltage control circuit and a voltage controlled oscillator. In an embodiment, each amplification module is coupled to an oscillator module, in an embodiment, each applicator is coupled to an amplification module. In an embodiment, the phase controller is communicatively coupled to each oscillator module.
Public/Granted literature
- US10720311B2 Phased array modular high-frequency source Public/Granted day:2020-07-21
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