Invention Application
- Patent Title: Microwave Plasma Source With Split Window
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Application No.: US16380294Application Date: 2019-04-10
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Publication No.: US20190311886A1Publication Date: 2019-10-10
- Inventor: Siva Chandrasekar , Quoc Truong , Dmitry A. Dzilno , Avinash Shervegar , Jozef Kudela , Tsutomu Tanaka , Alexander V. Garachtchenko , Yanjun Xia , Balamurugan Ramasamy , Kartik Shah
- Applicant: Applied Materials, Inc.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/511
Abstract:
Plasma source assemblies, gas distribution assemblies including the plasma source assembly and methods of generating plasma are described. The plasma source assemblies include a powered electrode with a ground electrode adjacent a first side, a first dielectric adjacent a second side of the powered electrode and at least one second dielectric adjacent the first dielectric on a side opposite the first dielectric. The sum of the thicknesses of the first dielectric and each of the second dielectrics is in the range of about 10 mm to about 17 mm.
Information query
