Invention Application
- Patent Title: LITHOGRAPHIC APPARATUS
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Application No.: US16099733Application Date: 2017-04-20
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Publication No.: US20190187566A1Publication Date: 2019-06-20
- Inventor: Hans BUTLER , Engelbertus Antonius Fransiscus VAN DER PASCH , Paul Corné Henri DE WIT
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP16171338.3 20160525
- International Application: PCT/EP2017/059383 WO 20170420
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A lithographic apparatus having a substrate table, a projection system, an encoder system, a measurement frame and a measurement system. The substrate table has a holding surface for holding a substrate. The projection system is for projecting an image on the substrate. The encoder system is for providing a signal representative of a position of the substrate table. The measurement system is for measuring a property of the lithographic apparatus. The holding surface is along a plane. The projection system is at a first side of the plane. The measurement frame is arranged to support at least part of the encoder system and at least part of the measurement system at a second side of the plane different from the first side.
Public/Granted literature
- US10466599B2 Lithographic apparatus Public/Granted day:2019-11-05
Information query
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