Invention Application
- Patent Title: PATTERNING DEVICE COOLING APPARATUS
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Application No.: US16090713Application Date: 2017-03-08
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Publication No.: US20190121248A1Publication Date: 2019-04-25
- Inventor: Günes NAKIBOGLU , Lowell Lane BAKER , Ruud Hendrikus Martinus Johannes BLOKS , Hakki Ergün CEKLI , Geoffrey Alan SCHULTZ , Laurentius Johannes Adrianus VAN BOKHOVEN , Frank Johannes Jacobus VAN BOXTEL , Jean-Philippe Xavier VAN DAMME , Christopher Charles WARD
- Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
- Applicant Address: NL Veldhoven NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee: ASML NETHERLANDS B.V.,ASML HOLDING N.V.
- Current Assignee Address: NL Veldhoven NL Veldhoven
- International Application: PCT/EP2017/055407 WO 20170308
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A patterning apparatus for a lithographic apparatus, the patterning apparatus including a patterning device support structure configured to support a patterning device having a planar surface; a patterning device conditioning system including a first gas outlet configured to provide a first gas flow over the planar surface in use and a second gas outlet configured to provide a second gas flow over the planar surface in use, wherein the first gas outlet and the second gas outlet are arranged at different distances perpendicular to the planar surface; and a control system configured to independently control a first momentum of gas exiting the first gas outlet and a second momentum of gas exiting the second gas outlet or to independently vary the first gas flow and/or the second gas flow over the planar surface of the patterning device.
Public/Granted literature
- US10394139B2 Patterning device cooling apparatus Public/Granted day:2019-08-27
Information query
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