发明申请
- 专利标题: Method for Forming a Vertical Channel Device, and a Vertical Channel Device
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申请号: US16119132申请日: 2018-08-31
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公开(公告)号: US20190081156A1公开(公告)日: 2019-03-14
- 发明人: Anabela Veloso , Geert Eneman , Nadine Collaert , Erik Rosseel
- 申请人: IMEC VZW
- 申请人地址: BE Leuven
- 专利权人: IMEC VZW
- 当前专利权人: IMEC VZW
- 当前专利权人地址: BE Leuven
- 优先权: EP17190060.8 20170908
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/10 ; H01L29/423 ; H01L21/02 ; H01L21/306 ; H01L29/78 ; H01L29/165 ; H01L29/08
摘要:
A device and method for forming a vertical channel device is disclosed. The method includes: forming a vertical semiconductor pillar on a substrate, the vertical semiconductor pillar including a first pillar section, a second pillar section and a third pillar section, wherein the second pillar section is arranged between the first pillar section and the third pillar section and wherein the second pillar section is formed of a material being different from a material forming an upper portion of the first pillar section and different from a material forming a lower portion of the third pillar section; forming a spacer layer on a peripheral surface of the upper portion of the first pillar section and on a peripheral surface of the lower portion of the third pillar section; and forming a gate stack embedding the second pillar section and said upper portion of the first pillar section and said lower portion of the third pillar section, wherein the spacer layer forms a spacer between the gate stack and said upper portion of the first pillar section and between the gate stack and said lower portion of the third pillar section.
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