A scanning head of a scanning probe microscope includes a scanning head frame having a first end portion and a second end portion which are oppositely disposed, the first end portion and the second end portion defining a first receiving space and a second receiving space, respectively; a sample table located in the first receiving space; a scanning module located in the second receiving space; and a plurality of fixed electrodes fixed on the second end portion of the scanning head frame. Signal lines of the scanning head of the present invention do not fall off or tear off during operation. In addition, the scanning head allows a laser to be incident on its scanning probe, enabling the scanning probe to be coupled with the laser, so that the range of application is wide.