Invention Application
- Patent Title: METHODS AND APPARATUSES FOR EFFLUENT MONITORING FOR BRUSH CONDITIONING
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Application No.: US15600021Application Date: 2017-05-19
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Publication No.: US20180337102A1Publication Date: 2018-11-22
- Inventor: Bradley Scott Withers , Corey Alan Hughes , Erik Scott Nelson , Steven Kenneth Christie , Brent Allan Best
- Applicant: Illinois Tool Works Inc.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/677 ; B24B29/00 ; H01L21/02 ; B24D13/14
Abstract:
Provided is a disclosure for embodiments that perform effluent monitoring for brush conditioning, where the monitored data may be fed back for use in the conditioning.
Public/Granted literature
- US10410936B2 Methods and apparatuses for effluent monitoring for brush conditioning Public/Granted day:2019-09-10
Information query
IPC分类:
