Invention Application
- Patent Title: MODULATING TRANSISTOR PERFORMANCE
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Application No.: US15297863Application Date: 2016-10-19
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Publication No.: US20180108661A1Publication Date: 2018-04-19
- Inventor: Dechao Guo , Juntao Li , Sanjay C. Mehta , Robert R. Robison , Huimei Zhou
- Applicant: International Business Machines Corporation
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L21/8238 ; H01L29/78 ; H01L21/02 ; H01L21/324

Abstract:
A method of forming an improved field-effect transistor device is provided. The method includes forming a tensile stressor near a first semiconductor fin. The first semiconductor fin is a fin of an n-channel field-effect transistor. The n-channel field-effect transistor is formed on a substrate. The method also includes forming a compressive stressor near a second semiconductor fin. The second semiconductor fin is a fin of a p-channel field effect transistor. The p-channel field-effect transistor is formed on the substrate. The method can also include forming neutral material over the at least one n-channel and p-channel field effect transistor. The method can also include achieving different device performance by configuring a stressor distance to fin and/or by configuring a stressor volume.
Public/Granted literature
- US10056382B2 Modulating transistor performance Public/Granted day:2018-08-21
Information query
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