- 专利标题: METHOD OF MANUFACTURING MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE
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申请号: US15807661申请日: 2017-11-09
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公开(公告)号: US20180065847A1公开(公告)日: 2018-03-08
- 发明人: Stephen E. LUCE , Anthony K. STAMPER
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: B81C1/00
- IPC分类号: B81C1/00 ; H01H59/00 ; H01H11/00 ; H01H49/00 ; H01H1/58
摘要:
An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode over a first electrode, forming a second cantilevered electrode over a second electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to at least one of the first electrode and a second electrode, and the first cantilevered electrode includes an arm with an extending protrusion which extends upward from an upper surface of the arm.
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