Invention Application
- Patent Title: METHOD OF FABRICATING SEMICONDUCTOR DEVICE
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Application No.: US15796874Application Date: 2017-10-30
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Publication No.: US20180047848A1Publication Date: 2018-02-15
- Inventor: En-Chiuan Liou , Tang-Chun Weng , Chien-Hao Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Priority: CN201510424934.2 20150720
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/66

Abstract:
A semiconductor device and a method of fabricating the same, the semiconductor device includes a plurality of fin shaped structures, a trench, a spacing layer and a dummy gate structure. The fin shaped structures are disposed on a substrate. The trench is disposed between the fin shaped structures. The spacing layer is disposed on sidewalls of the trench, wherein the spacing layer has a top surface lower than a top surface of the fin shaped structures. The dummy gate structure is disposed on the fin shaped structures and across the trench.
Public/Granted literature
- US10170623B2 Method of fabricating semiconductor device Public/Granted day:2019-01-01
Information query
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