- 专利标题: ADJUSTMENT OF POWER AND FREQUENCY BASED ON THREE OR MORE STATES
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申请号: US15665091申请日: 2017-07-31
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公开(公告)号: US20170330732A1公开(公告)日: 2017-11-16
- 发明人: John C. Valcore, JR. , Bradford J. Lyndaker
- 申请人: Lam Research Corporation
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H03J7/00 ; H01J37/244 ; H05H1/46
摘要:
Systems and methods for adjusting power and frequency based on three or more states are described. One of the methods includes receiving a pulsed signal having multiple states. The pulsed signal is received by multiple radio frequency (RF) generators. When the pulsed signal having a first state is received, an RF signal having a pre-set power level is generated by a first RF generator and an RF signal having a pre-set power level is generated by a second RF generator. Moreover, when the pulsed signal having a second state is received, RF signals having pre-set power levels are generated by the first and second RF generators. Furthermore, when the pulsed signal having a third state is received, RF signals having pre-set power levels are generated by the first and second RF generators.
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