Invention Application
- Patent Title: SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
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Application No.: US15654413Application Date: 2017-07-19
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Publication No.: US20170312826A1Publication Date: 2017-11-02
- Inventor: Raymond Wilhelmus Louis LAFARRE , Sjoerd Nicolaas Lambertus DONDERS , Nicolaas TEN KATE , Nina Vladimirovna DZIOMKINA , Yogesh Pramod KARADE , Elisabeth Corinne RODENBURG
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: B22F7/06
- IPC: B22F7/06 ; B33Y10/00 ; G03F7/20 ; B23Q3/18 ; B23K26/00 ; B22F3/105 ; B05D5/00 ; B05D3/06 ; B23K26/342 ; B33Y80/00
Abstract:
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
Information query
