- 专利标题: PLATING METHOD AND PLATING APPARATUS
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申请号: US15437157申请日: 2017-02-20
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公开(公告)号: US20170159203A1公开(公告)日: 2017-06-08
- 发明人: Yoshio MINAMI , Jumpei FUJIKATA , Takashi KISHI
- 申请人: EBARA CORPORATION
- 优先权: JP2012-071546 20120327
- 主分类号: C25D17/06
- IPC分类号: C25D17/06 ; C25D17/00
摘要:
A plating method includes holding a substrate with a substrate holder while bringing a sealing member into pressure contact with a peripheral portion of the substrate to form an enclosed internal space in the substrate holder; performing a first-stage leakage test of the substrate holder by producing a vacuum in the internal space and checking whether pressure in the internal space reaches a predetermined vacuum pressure within a certain period of time; and if the substrate holder has passed the first-stage leakage test, performing a second-stage leakage test of the substrate holder by closing off the internal space after producing the vacuum therein and checking whether a change in the pressure in the internal space reaches a predetermined value within a certain period of time.
公开/授权文献
- US10309030B2 Plating method and plating apparatus 公开/授权日:2019-06-04
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