Invention Application
- Patent Title: ION SOURCE LINER HAVING A LIP FOR ION IMPLANTATION SYSTEMS
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Application No.: US15344502Application Date: 2016-11-04
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Publication No.: US20170133193A1Publication Date: 2017-05-11
- Inventor: Neil K. Colvin , Tseh-Jen Hsieh
- Applicant: Axcelis Technologies, Inc.
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317

Abstract:
An ion source has an arc chamber having a body defining and interior region. A liner defined an exposure surface of the interior region that is exposed to a plasma generated within the arc chamber. An electrode has a shaft with a first diameter that passes through the body and the liner. The electrode is electrically isolated from the body where the liner is a plate having a first surface with an optional recess having a second surface. A hole is defined through the recess for the shaft to pass through. The hole has a second diameter that is larger than the first diameter, and an annular gap exists between the plate and the shaft. The plate has a lip extending from the second surface toward the first surface that surrounds the hole within the recess and generally prevents particulate contaminants from entering the annular gap.
Public/Granted literature
- US09978555B2 Ion source liner having a lip for ion implantation systems Public/Granted day:2018-05-22
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