Invention Application
- Patent Title: MEMS BASED PHOTONIC DEVICES AND METHODS FOR FORMING
- Patent Title (中): 基于MEMS的光电器件及其形成方法
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Application No.: US14749806Application Date: 2015-06-25
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Publication No.: US20160377805A1Publication Date: 2016-12-29
- Inventor: John J. Ellis-Monaghan , Brendan S. Harris , Vibhor Jain , Thomas Kessler , Yves T. Ngu , Sebastian T. Ventrone
- Applicant: International Business Machines Corporation
- Main IPC: G02B6/125
- IPC: G02B6/125 ; B81B7/02 ; G02B6/28 ; G02B6/122 ; G02B6/35

Abstract:
Various particular embodiments include a primary waveguide including an end section; cantilevered waveguides, each cantilevered waveguide including an end section disposed adjacent the end section of the primary waveguide; and control pins for applying an electrical bias to the cantilevered waveguides to selectively displace the end sections of the cantilevered waveguides away from the end section of the primary waveguide.
Public/Granted literature
- US09588293B2 MEMS based photonic devices and methods for forming Public/Granted day:2017-03-07
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