发明申请
- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14798712申请日: 2015-07-14
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公开(公告)号: US20160020310A1公开(公告)日: 2016-01-21
- 发明人: Tomofusa SHIGA , Hiromitsu TANABE
- 申请人: DENSO CORPORATION
- 优先权: JP2014-146275 20140716
- 主分类号: H01L29/739
- IPC分类号: H01L29/739 ; H01L21/66 ; H01L23/495 ; H01L29/06 ; H01L23/00 ; H01L29/423 ; H01L29/66
摘要:
A semiconductor device provides an element arrangement region on a semiconductor substrate including: a first semiconductor region on the semiconductor substrate; a second semiconductor region on the first semiconductor region; multiple trench gates penetrating the first semiconductor region and reaching the second semiconductor region; a third semiconductor region contacting the trench gate; a fourth semiconductor region on a rear surface; a first electrode connected to the first and second semiconductor regions; and a second electrode connected to the fourth semiconductor region. Each trench gate includes a main trench gate for generating a channel and a dummy trench gate for improving a withstand voltage of a component. The device further includes: a dummy gate wiring for applying a predetermined voltage to the dummy trench gate; and a dummy pad connected to the dummy gate wiring. The dummy pad and the first electrode are connected by a conductive member.
公开/授权文献
- US09847409B2 Semiconductor device and manufacturing method for the same 公开/授权日:2017-12-19
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