发明申请
- 专利标题: SEMICONDUCTOR DEVICE
- 专利标题(中): 半导体器件
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申请号: US14580651申请日: 2014-12-23
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公开(公告)号: US20150187952A1公开(公告)日: 2015-07-02
- 发明人: Shunpei Yamazaki , Tetsuhiro Tanaka , Hideomi Suzawa , Yasumasa Yamane , Yuhei Sato , Sachiaki Tezuka
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 优先权: JP2013-270926 20131227
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L27/088 ; H01L29/16
摘要:
To provide a transistor with stable electrical characteristics, a transistor with a low off-state current, a transistor with a high on-state current, a semiconductor device including the transistor, or a durable semiconductor device. The semiconductor device includes a first transistor using silicon, an aluminum oxide film over the first transistor, and a second transistor using an oxide semiconductor over the aluminum oxide film. The oxide semiconductor has a lower hydrogen concentration than silicon.
公开/授权文献
- US09472678B2 Semiconductor device 公开/授权日:2016-10-18
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