发明申请
- 专利标题: SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
- 专利标题(中): 半导体器件及其制造方法
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申请号: US14134043申请日: 2013-12-19
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公开(公告)号: US20140225251A1公开(公告)日: 2014-08-14
- 发明人: Jang-Hee LEE , Jongmin BAEK , Kyu-Hee HAN , Gilheyun CHOI , Jongwon HONG
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 优先权: KR10-2013-0015297 20130213
- 主分类号: H01L23/28
- IPC分类号: H01L23/28 ; H01L23/48
摘要:
Semiconductor devices, and methods of fabricating the same, include first conductive lines on a substrate, and a first molding layer covering the first conductive lines. The first conductive lines have air gaps between adjacent first conductive lines. Sidewalls of the first conductive lines and a bottom surface of the first molding layer collectively define a first gap region of each of the air gaps. The sidewalls of the first conductive lines and a top surface of the first molding layer collectively define a second air gap region of each of the air gaps.
公开/授权文献
- US09171781B2 Semiconductor devices and methods of fabricating the same 公开/授权日:2015-10-27
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