Invention Application
- Patent Title: Free Layer with High Thermal Stability for Magnetic Device Applications by Insertion of a Boron Dusting Layer
- Patent Title (中): 通过插入硼粉尘层的磁性器件应用具有高热稳定性的自由层
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Application No.: US13448557Application Date: 2012-04-17
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Publication No.: US20130270523A1Publication Date: 2013-10-17
- Inventor: Yu-Jen Wang , Witold Kula , Ru-Ying Tong , Guenole Jan
- Applicant: Yu-Jen Wang , Witold Kula , Ru-Ying Tong , Guenole Jan
- Applicant Address: US CA Milpitas
- Assignee: HEADWAY TECHNOLOGIES, INC.
- Current Assignee: HEADWAY TECHNOLOGIES, INC.
- Current Assignee Address: US CA Milpitas
- Main IPC: H01L43/10
- IPC: H01L43/10 ; H01L43/12

Abstract:
A boron or boron containing dusting layer such as CoB or FeB is formed along one or both of top and bottom surfaces of a free layer at interfaces with a tunnel barrier layer and capping layer to improve thermal stability while maintaining other magnetic properties of a MTJ stack. Each dusting layer has a thickness from 0.2 to 20 Angstroms and may be used as deposited, or at temperatures up to 400° C. or higher, or following a subsequent anneal at 400° C. or higher. The free layer may be a single layer of CoFe, Co, CoFeB or CoFeNiB, or may include a non-magnetic insertion layer. The resulting MTJ is suitable for STT-MRAM memory elements or spintronic devices. Perpendicular magnetic anisotropy is maintained in the free layer at temperatures up to 400° C. or higher. Ku enhancement is achieved and the retention time of a memory cell for STT-MRAM designs is increased.
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