发明申请
US20130243958A1 UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER CONTAINING BLOCK COPOLYMER
审中-公开
底层试剂和形成含嵌段共聚物层的图案的方法
- 专利标题: UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER CONTAINING BLOCK COPOLYMER
- 专利标题(中): 底层试剂和形成含嵌段共聚物层的图案的方法
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申请号: US13790206申请日: 2013-03-08
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公开(公告)号: US20130243958A1公开(公告)日: 2013-09-19
- 发明人: Takahiro Senzaki , Ken Miyagi , Tsuyoshi Kurosawa , Daiju Shiono , Tasuku Matsumiya , Kenichiro Miyashita , Katsumi Ohmori
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2012-057693 20120314; JP2013-020932 20130205
- 主分类号: C09D143/04
- IPC分类号: C09D143/04 ; C09D135/06 ; C09D133/08 ; C09D133/02 ; C09D133/22
摘要:
An undercoat agent which is used for phase separating a layer including a block copolymer having a plurality of blocks bonded formed on a substrate, wherein the undercoat agent contains a resin component, the resin component includes a structural unit having an aromatic ring and a structural unit having no aromatic ring, and the resin component includes a group which can interact with the substrate and does not include a 3 to 7-membered, ether-containing cyclic group; and a method of forming a pattern of a layer containing a block copolymer, including: a step (1) in which the undercoat agent is applied to a substrate to form a layer containing the undercoat agent; a step (2) in which a layer containing a block copolymer having a plurality of blocks bonded is formed on a surface of the layer containing the undercoat agent, followed by a phase separation of the layer containing the block copolymer; and a step (3) in which a phase containing at least one block of the plurality of blocks constituting the block copolymer is selectively removed.
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