Invention Application
- Patent Title: RESURF SEMICONDUCTOR DEVICE CHARGE BALANCING
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Application No.: US13781722Application Date: 2013-02-28
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Publication No.: US20130175616A1Publication Date: 2013-07-11
- Inventor: WON GI MIN , ZHIHONG ZHANG , HONGZHONG XU , JIANG-KAI ZUO
- Applicant: WON GI MIN , ZHIHONG ZHANG , HONGZHONG XU , JIANG-KAI ZUO
- Applicant Address: US TX Austin
- Assignee: FREESCALE SEMICONDUCTOR, INC.
- Current Assignee: FREESCALE SEMICONDUCTOR, INC.
- Current Assignee Address: US TX Austin
- Main IPC: H01L29/78
- IPC: H01L29/78

Abstract:
Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices, e.g., LDMOS transistors, by careful charge balancing, even when body and drift region charge balance is not ideal, by: (i) providing a plug or sinker near the drain and of the same conductivity type extending through the drift region at least into the underlying body region, and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall coupled to the device buried layer, and/or (iii) providing a variable resistance bridge between the isolation wall and the drift region. The bridge may be a FET whose source-drain couple the isolation wall and drift region and whose gate receives control voltage Vc, or a resistor whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer via the isolation wall.
Public/Granted literature
- US09041103B2 RESURF semiconductor device charge balancing Public/Granted day:2015-05-26
Information query
IPC分类: