Invention Application
US20130154090A1 Semiconductor Device and Method of Forming Interconnect Structure with Conductive Pads Having Expanded Interconnect Surface Area for Enhanced Interconnection Properties 有权
半导体器件和与具有扩展的互连表面积的导电垫形成互连结构的方法,用于增强的互连特性

  • Patent Title: Semiconductor Device and Method of Forming Interconnect Structure with Conductive Pads Having Expanded Interconnect Surface Area for Enhanced Interconnection Properties
  • Patent Title (中): 半导体器件和与具有扩展的互连表面积的导电垫形成互连结构的方法,用于增强的互连特性
  • Application No.: US13768862
    Application Date: 2013-02-15
  • Publication No.: US20130154090A1
    Publication Date: 2013-06-20
  • Inventor: DaeSik ChoiOhHan KimSungWon Cho
  • Applicant: STATS ChipPAC, Ltd.
  • Applicant Address: SG Singapore
  • Assignee: STATS CHIPPAC, LTD.
  • Current Assignee: STATS CHIPPAC, LTD.
  • Current Assignee Address: SG Singapore
  • Main IPC: H01L21/56
  • IPC: H01L21/56 H01L23/498
Semiconductor Device and Method of Forming Interconnect Structure with Conductive Pads Having Expanded Interconnect Surface Area for Enhanced Interconnection Properties
Abstract:
A semiconductor device has a substrate and first conductive pads formed over the substrate. An interconnect surface area of the first conductive pads is expanded by forming a plurality of recesses into the first conductive pads. The recesses can be an arrangement of concentric rings, arrangement of circular recesses, or arrangement of parallel linear trenches. Alternatively, the interconnect surface area of the first conductive pads is expanded by forming a second conductive pad over the first conductive pad. A semiconductor die has a plurality of interconnect structures formed over a surface of the semiconductor die. The semiconductor die is mounted to the substrate with the interconnect structures contacting the expanded interconnect surface area of the first conductive pads to increase bonding strength of the interconnect structure to the first conductive pads. A mold underfill material is deposited between the semiconductor die and substrate.
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