发明申请
- 专利标题: Electrode Connecting Structures Containing Copper
- 专利标题(中): 含铜电极连接结构
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申请号: US13685174申请日: 2012-11-26
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公开(公告)号: US20130140697A1公开(公告)日: 2013-06-06
- 发明人: Kun-Sang Park , Byung-Lyul PARK , Su-Kyoung KIM , Kwang-Jin MOON , Suk-Chul BANG , Do-Sun LEE , Dong-Chan LIM , Gil-Heyun CHOI
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2011-0128430 20111202
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
Provided are electrode-connecting structures or semiconductor devices, including a lower device including a lower substrate, a lower insulating layer formed on the lower substrate, and a lower electrode structure formed in the lower insulating layer, wherein the lower electrode structure includes a lower electrode barrier layer and a lower metal electrode formed on the lower electrode barrier layer, and an upper device including an upper substrate, an upper insulating layer formed under the upper substrate, and an upper electrode structure formed in the upper insulating layer, wherein the upper electrode structure includes an upper electrode barrier layer extending from the inside of the upper insulating layer under a bottom surface thereof and an upper metal electrode formed on the upper electrode barrier layer. The lower metal electrode is in direct contact with the upper metal electrode.
公开/授权文献
- US08860221B2 Electrode connecting structures containing copper 公开/授权日:2014-10-14
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