Invention Application
- Patent Title: METHODS OF MANUFACTURING LARGE-AREA SPUTTERING TARGETS USING INTERLOCKING JOINTS
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Application No.: US13628090Application Date: 2012-09-27
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Publication No.: US20130082033A1Publication Date: 2013-04-04
- Inventor: Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
- Applicant: H.C. Starck, Inc.
- Applicant Address: US MA Newton
- Assignee: H.C. STARCK, INC.
- Current Assignee: H.C. STARCK, INC.
- Current Assignee Address: US MA Newton
- Main IPC: B23K31/02
- IPC: B23K31/02
Abstract:
In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
Public/Granted literature
- US09108273B2 Methods of manufacturing large-area sputtering targets using interlocking joints Public/Granted day:2015-08-18
Information query
IPC分类:
