发明申请
US20120251655A1 Method of Manufacturing Stamper, and Stamper 审中-公开
制造压模和压模的方法

Method of Manufacturing Stamper, and Stamper
摘要:
According to one embodiment, a stamper is described with a surface that comprises patterns of protrusions and recessed. The arithmetic average roughness Ra of the surface is 1 nanometer (nm) or more and 5 nm or less.
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