发明申请
- 专利标题： Method of Manufacturing Stamper, and Stamper
- 专利标题（中）： 制造压模和压模的方法
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申请号： US13492681申请日： 2012-06-08
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公开(公告)号： US20120251655A1公开(公告)日： 2012-10-04
- 发明人: Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
- 申请人： Shinobu Sugimura , Kaori Kimura , Takuya Shimada , Yoshiyuki Kamata , Masatoshi Sakurai
- 专利权人： KABUSHIKI KAISHA TOSHIBA
- 当前专利权人： KABUSHIKI KAISHA TOSHIBA
- 优先权： JP2007-256161 20070928
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
According to one embodiment, a stamper is described with a surface that comprises patterns of protrusions and recessed. The arithmetic average roughness Ra of the surface is 1 nanometer (nm) or more and 5 nm or less.
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