Invention Application
- Patent Title: HANDLING LAYER FOR TRANSPARENT SUBSTRATE
- Patent Title (中): 用于透明基板的处理层
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Application No.: US12905358Application Date: 2010-10-15
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Publication No.: US20120091598A1Publication Date: 2012-04-19
- Inventor: Chun-Ren Cheng , Yi-Hsien Chang , Allen Timothy Chang , Ching-Ray Chen , Li-Cheng Chu , Hung-Hua Lin , Yuan-Chih Hsieh , Lan-Lin Chao
- Applicant: Chun-Ren Cheng , Yi-Hsien Chang , Allen Timothy Chang , Ching-Ray Chen , Li-Cheng Chu , Hung-Hua Lin , Yuan-Chih Hsieh , Lan-Lin Chao
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L21/71

Abstract:
A device is provided which includes a transparent substrate. An opaque layer is disposed on the transparent substrate. A conductive layer disposed on the opaque layer. The opaque layer and the conductive layer form a handling layer, which may be used to detect and/or align the transparent wafer during fabrication processes. In an embodiment, the conductive layer includes a highly-doped silicon layer. In an embodiment, the opaque layer includes a metal. In embodiment, the device may include a MEMs device.
Public/Granted literature
- US08405169B2 Handling layer for transparent substrate Public/Granted day:2013-03-26
Information query
IPC分类: