发明申请
- 专利标题: GAP PROCESSING
- 专利标题(中): GAP处理
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申请号: US13282563申请日: 2011-10-27
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公开(公告)号: US20120040534A1公开(公告)日: 2012-02-16
- 发明人: Arthur J. McGinnis , Sachin Joshi , Chan Lim
- 申请人: Arthur J. McGinnis , Sachin Joshi , Chan Lim
- 申请人地址: US ID Boise
- 专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人: MICRON TECHNOLOGY, INC.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L21/31
- IPC分类号: H01L21/31
摘要:
Among various methods, devices, and apparatuses, a number of methods are provided for forming a gap between circuitry. One such method includes depositing a first oxide precursor material on at least two conductive lines having at least one gap between the at least two conductive lines, and forming a breadloaf configuration with the first oxide precursor material on a top of each of the at least two conductive lines that leaves a space between a closest approach of at least two adjacent breadloaf configurations. The method also includes depositing a second oxide precursor material over the first oxide precursor material, where depositing the second oxide precursor material results in closing the space between the closest approach of the at least two adjacent breadloaf configurations.
公开/授权文献
- US08293617B2 Gap processing 公开/授权日:2012-10-23
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