发明申请
US20110163279A1 OXIDE SINTERED COMPACT FOR PRODUCING TRANSPARENT CONDUCTIVE FILM 有权
用于生产透明导电膜的氧化物烧结紧密

OXIDE SINTERED COMPACT FOR PRODUCING TRANSPARENT CONDUCTIVE FILM
摘要:
The present invention provides a sputtering target suitable for producing an amorphous transparent conductive film which can be formed without heating a substrate and without feeding water during the sputtering; which is easily crystallized by low-temperature annealing; and which has low resistivity after the crystallization. An oxide sintered compact containing an indium oxide as a main component, while containing tin as a first additive element, and one or more elements selected from germanium, nickel, manganese, and aluminum as a second additive element, with the content of tin which is the first additive element being 2-15 atom % relative to the total content of indium and tin, and the total content of the second additive element being 0.1-2 atom % relative to the total content of indium, tin and the second additive element.
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