发明申请
US20110163279A1 OXIDE SINTERED COMPACT FOR PRODUCING TRANSPARENT CONDUCTIVE FILM
有权
用于生产透明导电膜的氧化物烧结紧密
- 专利标题: OXIDE SINTERED COMPACT FOR PRODUCING TRANSPARENT CONDUCTIVE FILM
- 专利标题(中): 用于生产透明导电膜的氧化物烧结紧密
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申请号: US13063141申请日: 2009-09-18
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公开(公告)号: US20110163279A1公开(公告)日: 2011-07-07
- 发明人: Masakatsu Ikisawa , Masataka Yahagi
- 申请人: Masakatsu Ikisawa , Masataka Yahagi
- 申请人地址: JP Tokyo
- 专利权人: JX Nippon Mining & Metals Corporation
- 当前专利权人: JX Nippon Mining & Metals Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2008246468 20080625
- 国际申请: PCT/JP2009/066391 WO 20090918
- 主分类号: H01B1/02
- IPC分类号: H01B1/02 ; C23C14/35 ; C23C14/08
摘要:
The present invention provides a sputtering target suitable for producing an amorphous transparent conductive film which can be formed without heating a substrate and without feeding water during the sputtering; which is easily crystallized by low-temperature annealing; and which has low resistivity after the crystallization. An oxide sintered compact containing an indium oxide as a main component, while containing tin as a first additive element, and one or more elements selected from germanium, nickel, manganese, and aluminum as a second additive element, with the content of tin which is the first additive element being 2-15 atom % relative to the total content of indium and tin, and the total content of the second additive element being 0.1-2 atom % relative to the total content of indium, tin and the second additive element.
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