发明申请
- 专利标题: Damascene coil processes and structures
- 专利标题(中): 大马士革线圈工艺和结构
-
申请号: US12466353申请日: 2009-05-14
-
公开(公告)号: US20100290157A1公开(公告)日: 2010-11-18
- 发明人: Jinqiu Zhang , Hongping Yuan , Hai Sun , Ming Zhao
- 申请人: Jinqiu Zhang , Hongping Yuan , Hai Sun , Ming Zhao
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/17
- IPC分类号: G11B5/17 ; B05D3/00 ; B44C1/22 ; C25D5/34
摘要:
A magnetic recording head is provided. The magnetic recording head comprises a write pole and a write coil structure configured to generate a magnetic field in the write pole. The write coil structure comprises a substrate layer and a coil material disposed within the substrate layer. The write coil structure is substantially free of photoresist. A method for forming a write coil structure is also provided. The method comprises the steps of providing a substrate layer, forming a photoresist pattern mask over the substrate layer, opening a damascene trench in the substrate layer by reactive ion etching, and disposing a coil material into the damascene trench in the substrate layer.
信息查询
IPC分类: