发明申请
US20090262765A1 SMALL DIMENSION HIGH-EFFICIENCY HIGH-SPEED VERTICAL-CAVITY SURFACE-EMITTING LASERS 有权
小尺寸高效高速垂直表面发射激光

SMALL DIMENSION HIGH-EFFICIENCY HIGH-SPEED VERTICAL-CAVITY SURFACE-EMITTING LASERS
摘要:
A Vertical-Cavity Surface-Emitting Laser (VCSEL) is disclosed, comprising an optical cavity bounded by a top mirror and a bottom mirror, wherein the top mirror has multiple layers of alternating refractive index, of which the bottom three or more layers of the top mirror are deep oxidation layers having an increased oxidation length, a light emitting active region between the top mirror and the bottom mirror, and an aperture with tapered edges between the active region and the top mirror, wherein the aperture has a thickness, a taper length, an oxide aperture length, a taper angle, and an aperture opening diameter designed to reduce an optical mode's diameter without significantly increasing the optical mode's round trip scattering loss.
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