发明申请
- 专利标题: SMALL DIMENSION HIGH-EFFICIENCY HIGH-SPEED VERTICAL-CAVITY SURFACE-EMITTING LASERS
- 专利标题(中): 小尺寸高效高速垂直表面发射激光
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申请号: US12410388申请日: 2009-03-24
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公开(公告)号: US20090262765A1公开(公告)日: 2009-10-22
- 发明人: Yu-Chia Chang , Larry A. Coldren
- 申请人: Yu-Chia Chang , Larry A. Coldren
- 申请人地址: US CA Oakland
- 专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人地址: US CA Oakland
- 主分类号: H01S3/10
- IPC分类号: H01S3/10 ; H01S5/183 ; G06F17/50 ; H01S5/00
摘要:
A Vertical-Cavity Surface-Emitting Laser (VCSEL) is disclosed, comprising an optical cavity bounded by a top mirror and a bottom mirror, wherein the top mirror has multiple layers of alternating refractive index, of which the bottom three or more layers of the top mirror are deep oxidation layers having an increased oxidation length, a light emitting active region between the top mirror and the bottom mirror, and an aperture with tapered edges between the active region and the top mirror, wherein the aperture has a thickness, a taper length, an oxide aperture length, a taper angle, and an aperture opening diameter designed to reduce an optical mode's diameter without significantly increasing the optical mode's round trip scattering loss.
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