发明申请
- 专利标题: Micro-Electromechanical System Memory Device and Method of Making the Same
- 专利标题(中): 微机电系统存储器及其制作方法
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申请号: US12085506申请日: 2006-11-22
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公开(公告)号: US20090134522A1公开(公告)日: 2009-05-28
- 发明人: Charles Gordon Smith , Robert Kazinczi , Robertus P. Van Kampen
- 申请人: Charles Gordon Smith , Robert Kazinczi , Robertus P. Van Kampen
- 申请人地址: US CA SAN JOSE
- 专利权人: CAVENDISH KINETICS LTD.
- 当前专利权人: CAVENDISH KINETICS LTD.
- 当前专利权人地址: US CA SAN JOSE
- 优先权: GBV0523645.0 20051122
- 国际申请: PCT/GB2006/004353 WO 20061122
- 主分类号: H01L29/45
- IPC分类号: H01L29/45 ; H01L21/441
摘要:
A method of manufacturing a non-volatile memory bitcell comprises the steps of depositing a first layer of conductive material on a substrate and patterning and etching the first layer of conductive material to form three non-linearly disposed electrodes. The method also comprises the steps of depositing a first layer of sacrificial material on the electrodes and the substrate and providing an elongate cantilever structure on the first layer of sacrificial material such that the cantilever structure and at least a portion of each electrode overlap each other. The method also includes the steps of depositing a second layer of sacrificial material on the cantilever structure and the first layer of sacrificial material and providing a capping layer on the second layer of sacrificial material and providing holes in the capping layer such that at least a portion of the second layer of sacrificial material is exposed. Finally, the method provides the step of removing the first and second layers of sacrificial material through the holes provided in the capping layer, thereby defining a cavity in which the cantilever structure is suspended.
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