发明申请
- 专利标题: TECHNIQUES FOR PROVIDING ION SOURCE FEED MATERIALS
- 专利标题(中): 提供离子源材料的技术
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申请号: US11776217申请日: 2007-07-11
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公开(公告)号: US20080169427A1公开(公告)日: 2008-07-17
- 发明人: Christopher R. HATEM , Craig R. Chaney , Eric R. Cobb , Joseph C. Olson , Chris Campbell
- 申请人: Christopher R. HATEM , Craig R. Chaney , Eric R. Cobb , Joseph C. Olson , Chris Campbell
- 申请人地址: US MA GLOUCESTER
- 专利权人: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人地址: US MA GLOUCESTER
- 主分类号: B01J37/30
- IPC分类号: B01J37/30
摘要:
Techniques for providing ion source feed materials are disclosed. In one particular exemplary embodiment, the techniques may be realized as a container for supplying an ion source feed material. The container may comprise an internal cavity to be pre-filled with an ion source feed material. The container may also comprise an outer body configured to be removably loaded into a corresponding housing that is coupled to an ion source chamber via a nozzle assembly. The container may further comprise an outlet to seal in the pre-filled ion source feed material, the outlet being further configured to engage with the nozzle assembly to establish a flow path between the internal cavity and the ion source chamber. The container may be configured to be a disposable component.
公开/授权文献
- US07655932B2 Techniques for providing ion source feed materials 公开/授权日:2010-02-02
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