发明申请
- 专利标题: Electronic optical lens barrel and production method therefor
- 专利标题(中): 电子光学镜筒及其制作方法
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申请号: US10516827申请日: 2003-06-10
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公开(公告)号: US20050173649A1公开(公告)日: 2005-08-11
- 发明人: Katsuya Okumura , Motosuke Miyoshi
- 申请人: Katsuya Okumura , Motosuke Miyoshi
- 优先权: JP2002173174 20020613
- 国际申请: PCT/JP03/07331 WO 20030610
- 主分类号: G21K1/08
- IPC分类号: G21K1/08 ; H01J3/14 ; H01J3/26 ; H01J37/12 ; H01J37/147 ; H01J37/153 ; H01J37/16
摘要:
The present invention provides an electron optical lens column suitable for miniaturization, and provides the manufacturing method thereof. The column unit (1) comprises an inner column (11) and an outer column (12). The column unit is, as a whole, structured from a high-resistance electrically conductive ceramic. Electrostatic lenses (21, 22, 23, and 24) are affixed to the inner surface (111) of the inner column using a means such as plating or vapor deposition. Of the electrodes or electrode parts (211-213, 221, 231, 232, and 241-243) from which the lens is structured, those that share the same electric potential are connected by shared interconnections. This makes it possible to connect all of the electrodes or electrode parts with shared electric potentials as a group to the external interconnections.
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