- 专利标题: Composite substrate carrier
-
申请号: US11092528申请日: 2005-03-29
-
公开(公告)号: US20050167312A1公开(公告)日: 2005-08-04
- 发明人: Sanjiv Bhatt , Shawn Eggum
- 申请人: Sanjiv Bhatt , Shawn Eggum
- 专利权人: Entegris, Inc.
- 当前专利权人: Entegris, Inc.
- 主分类号: B29C45/14
- IPC分类号: B29C45/14 ; B29C45/16 ; B29K69/00 ; B29K73/00 ; B29K79/00 ; G03F7/20 ; H01L21/673 ; B65D85/30
摘要:
A composite wafer carrier according to an embodiment of the present invention comprises an operative portion formed of a first thermoplastic material and a support portion formed of a second different thermoplastic material. One of the operative portion and support portion is overmolded onto the other to form a gapless hermitic interface that securely bonds the portions together. The operative portion may be a transparent window, a portion of a latching mechanism or a wafer contact portion. Preferred embodiments of the invention include wafer carriers with said features, process carriers with said features and a process for manufacturing wafer carriers with said features.
公开/授权文献
- US07168564B2 Composite substrate carrier 公开/授权日:2007-01-30
信息查询